Experimental characterization of pull-in parameters for an electrostatically actuated cantilever
نویسندگان
چکیده
منابع مشابه
Pull-in Dynamics of Electrostatically-actuated Beams
We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensio...
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ژورنال
عنوان ژورنال: Applications in Engineering Science
سال: 2020
ISSN: 2666-4968
DOI: 10.1016/j.apples.2020.100014